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反应连接230 mm口径RB-SiC反射镜

张斌智 张舸 董德义

光学精密工程2012,Vol.20Issue(11):2360-2364,5.
光学精密工程2012,Vol.20Issue(11):2360-2364,5.DOI:10.3788/OPE.20122011.2360

反应连接230 mm口径RB-SiC反射镜

230 mm aperture RB-SiC mirror by reaction-formed joint

张斌智 1张舸 2董德义1

作者信息

  • 1. 中国科学院长春光学精密机械与物理研究所中科院光学系统先进制造技术重点实验室,吉林长春130033
  • 2. 中国科学院大学,北京,100039
  • 折叠

摘要

Abstract

As the aperture for a monolithic mirror was limited in 1. 2 m by traditional technologies, a new reaction-formed joint technology for RB-SiC was proposed. With the proprosed technology, the SiC mirror was joined in the green body process, and the green body densification and the joint of mirror were finished in the same sintering process. A 230 mm diameter RB-SiC mirror was fabricated by this technology. After milling and polishing finely with the FSJG-2 facility, the figure error of the mirror surface is less than A/50(A = 632. 8 nm) . The mirror was tested in the temperature range of (20 + 3) °C , and the tested results show that the change of the figure error of the mirror surface is less than A/300, and the mirror surface figure is not changed obviously after the thermal cycle test. Moreover, the roughness of the surface near the joint line is 3. 3 nm, and its microstructure is similar to that of the RB-SiC ceramic. The thermal property of welding line is matching with that of RB-SiC ceramic. Obtained results demonstrate that the reaction-formed joint technology for the RB-SiC mirror satisfies the need of the large aperture mirror used in space optics.

关键词

反应连接/碳化硅/RB-SiC反射镜/表面轮廓

Key words

reaction-formed joint/ SiC/ RB-SiC Mirror/ Surface profile

分类

信息技术与安全科学

引用本文复制引用

张斌智,张舸,董德义..反应连接230 mm口径RB-SiC反射镜[J].光学精密工程,2012,20(11):2360-2364,5.

基金项目

国家自然科学基金重点项目(No.61036015) (No.61036015)

科技部国际合作项目(No.2011DFA50590) (No.2011DFA50590)

光学精密工程

OA北大核心CSCDCSTPCD

1004-924X

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