光学精密工程2012，Vol.20Issue(11)：2433-2438,6.DOI:10.3788/OPE.20122011.2433
双波长集成光栅干涉微位移测量方法
Displacement measurement method based on integrated grating interferometry with two-wavelength lasers
摘要
Abstract
A displacement detection method based on two-wavelength grating interferometry was presented. A measurement experiment was carried out by using an integrated grating sensor chip fabricated by silicon-glass bonding bulk process. The measurement setup consisted of a sensor chip, two lasers with wavelengths of 640 nm and 660 nm, two photodetectors and a data acquisition circuit. The sensor chip included moving parts with a reflective surface and a metal grating on the transparent substrate. In experiment, the laser beam illuminated the grating and the grating reflected the laser beam to form a diffraction pattern. As the intensity of the diffracted beams changed according to the displacement between movable structure and substrate, the displacement could be determined with an ex- tended range than single wavelength and the absolute position could be obtained by measuring intensity signals of the two wavelengths respectively. Experimental results show that the initial gap between the moving part and the substrate is about 7. 522 (im measured by proposed method and it can implement the displacement measurement in a range of 618 nm with a resolution of 0. 2 nm.关键词
位移测量/集成光栅/双波长干涉法/扩量程Key words
displacement measurement/ integrated grating/ two wavelength interferometry/ extendedrange分类
信息技术与安全科学引用本文复制引用
陈烽,叶雄英,伍康,冯金扬..双波长集成光栅干涉微位移测量方法[J].光学精密工程,2012,20(11):2433-2438,6.基金项目
国家自然科学基金资助项目(No.50730009,No.91023027) （No.50730009,No.91023027）
