光学精密工程2012，Vol.20Issue(11)：2479-2484,6.DOI:10.3788/OPE.20122011.2479
基准圆光栅偏心检测及测角误差补偿
Eccentric testing of benchmark circular grating and compensation of angular error
摘要
Abstract
To correct the measuring angle errors derived from the eccentricity of installing a circular grating in a manipulator joint test system, a model for compensation of grating measuring angle errors and the test method for installing eccentric errors are investigated. First, according to the relationship between angular error and eccentric parameters, the paper deduces the model of angular errors caused by install eccentricity. Then, it describes the method and principle to detect the grating eccentricity and eccentric direction by receiving phase errors of signals using two sensors in contrast. Based on the Lissajous plot generated by composite signals, the eccentric parameters of the grating in manipulator joint test system is measured. Finally, using the angle error formulas to compensate the measuring angle, the measuring system has been amended. The experiment shows that the amended angular accuracy has greatly improved, and the measurement accuracy is increased by nearly five times. It can satisfy the requirements of high accurate systems.关键词
角度测量/圆光栅/系统误差补偿/偏心距检测/偏心方向检测Key words
angle measurement/ circular grating/ system error compensation/ eccentric range test/ eccentric direction test分类
通用工业技术引用本文复制引用
艾晨光,褚明,孙汉旭,张延恒,叶平..基准圆光栅偏心检测及测角误差补偿[J].光学精密工程,2012,20(11):2479-2484,6.基金项目
国家自然科学基金资助项目(No.61175080) （No.61175080）
高等学校博士学科点专项科研基金资助项目(No.20110005120004) （No.20110005120004）
中央高校基本科研业务费专项资金资助项目(No.2011PTB-00-11) （No.2011PTB-00-11）
