工业工程2012，Vol.15Issue(5)：26-32,7.DOI:10.3969/j.issn.1007-7375.2012.05.005
基于eM-Plant求解具有晶圆重入过程的单臂组合设备最优调度的仿真方法
eM-Plant-Based Simulation Method for Optimal Scheduling of Single-Arm Cluster Tools with Wafer Revisiting
摘要
Abstract
For some wafer fabrication processes in cluster tools, wafer revisiting is required. Atomic layer deposition ( ALD) is such a typical revisiting process. It is a challenging problem to schedule a cluster tool for such a process. A study is conducted to schedule single-arm cluster tools to find an optimal schedule of the revisiting process of ALD. To do so, a Petri net model is developed to describe the behavior of the system. With this model, an optimal schedule can be obtained from very limited number of candidate schedules by just comparing the cycle time of these schedules. Based on the Petri net model, a simulation system is developed by using eM-Plant platform such that the cycle time of a schedule for the revisiting process can be efficiently obtained. In this way, given the parameters of the system for the revisiting process, an optimal schedule can be efficiently found. Illustrative examples are given to show the application of the proposed method.关键词
自动组合装置/调度/晶圆制造/重入加工/仿真Key words
cluster tools/ scheduling/ wafer fabrication/ revisiting process/ simulation分类
信息技术与安全科学引用本文复制引用
孙玉玺,伍乃骐..基于eM-Plant求解具有晶圆重入过程的单臂组合设备最优调度的仿真方法[J].工业工程,2012,15(5):26-32,7.基金项目
国家自然科学基金资助项目(60974098) （60974098）
高等学校博士点学科专项科研基金资助项目(20094420110002) （20094420110002）
