现代制造工程Issue(12)：1-3,3.
用于光阱刚度测量的位置传感器标定实验研究
Calibration of position sensitive sensor for optical trap stiffness measurement
摘要
Abstract
For the calibration of the position sensitive sensor, piezoelectric ceramic drive platform is used to drive the sample pool, on the floor of which a polystyrene sphere with a diameter of φ2. 5 μm is fixed. The micro sphere is passed through an optical trap at different axial position; the displacement of the micro sphere is obtained by position sensitive sensor. The experimental results show that,as the optical trap is located at different axial position,the sensitivity of the sensor varies. In the practice,the calibration result from the case that the micro sphere and the optical trap arc at the same axial position is adopted.关键词
位置传感器/压电陶瓷驱动平台/微操纵/光电探测/位移测量Key words
position sensitive detector/ piezoelectric ceramic drive platform/ micro manipulation/ opto-electronic detection/ displacement measurement分类
机械制造引用本文复制引用
曹杰,李静,杜刚,许凯..用于光阱刚度测量的位置传感器标定实验研究[J].现代制造工程,2012,(12):1-3,3.基金项目
国家自然基金项目(50975271) （50975271）
国家大学生创新计划项目 （）
