强激光与粒子束2012，Vol.24Issue(10)：2296-2300,5.DOI:10.3788/HPLPB20122410.2296
大口径连续相位板面形检测与评价
Surface measurement and evaluation of large-aperture continuous phase plates
温圣林 1石琦凯 1颜浩 1张远航 1杨春林 1王健1
作者信息
- 1. 成都精密光学工程研究中心,成都610041
- 折叠
摘要
Abstract
Based on the stitching method using global least squares and the image fusion method, the sub-aperture stitching interferometry method for continuous phase plates (CPPs) is established. The residual surface error calculated by correlative matching is used to evaluate the CPP's fabrication quality. Moreover, the measurement system is built using high precision dynamic interferometer. The numerical simulation and measurement are carried into execution for a CPP with 430 mm × 430 mm aperture. The results show that the root mean square(RMS) of residual surface error obtained by numerical simulation is only 0. 005 nm and the experimental RMS of residual surface error is less than 5 nm. So these parameters can meet the demands of surface measurement and evaluation of large-aperture continuous phase plates, and the correctness and feasibility of this method are verified.关键词
光学设计与制造/连续相位板/子孔径拼接检测/面形残差/惯性约束聚变Key words
optical design and fabrication/ continuous phase plate/ sub-aperture stitching interferometry/ residual surface error/ inertial confinement fusion分类
数理科学引用本文复制引用
温圣林,石琦凯,颜浩,张远航,杨春林,王健..大口径连续相位板面形检测与评价[J].强激光与粒子束,2012,24(10):2296-2300,5.
