强激光与粒子束2012，Vol.24Issue(10)：2371-2374,4.DOI:10.3788/HPLPB20122410.2371
基于PⅢ技术的高真空洁净环境中润滑问题
Lubrication improvement based on PⅢ technology in high vacuum and clean circumstance
摘要
Abstract
In order to improve the lubrication of movement mechanism in final optics assembly, the plasma immersion ion implantation (PHI) technology is used to modify mechanical properties of work pieces with complex shape. The combination of suitable parameters can largely increase the hardness and wear resistance of material surfaces. The verification test was made by modifying the mechanical properties of the bearing inner race and bearing outer ring. Furthermore, the dimensional accuracy and the surface roughness of sample work pieces modified by PHI technology can maintain consistence with those of untreated pieces. The work sufficiently certificates that the PHI technology can amend the mechanical properties of work pieces and elongate the life length of movement mechanism kinematic accuracy.关键词
等离子体浸没离子注入/高真空/摩擦磨损/PⅢ技术Key words
plasma immersion ion implantation/ high vacuum/ frictional wear/ PHI technology分类
机械制造引用本文复制引用
曹永智,卢礼华,于福利,陈家轩,张庆春,梁迎春..基于PⅢ技术的高真空洁净环境中润滑问题[J].强激光与粒子束,2012,24(10):2371-2374,4.基金项目
国家高技术发展计划项目:国家自然科学基金项目(51075088) （51075088）
博士点青年基金项目(20092302120005) （20092302120005）
黑龙江省基金项目(E201019) （E201019）
