强激光与粒子束2012，Vol.24Issue(10)：2391-2399,9.DOI:10.3788/HPLPB20122410.2391
光学薄膜鲁棒设计中膜系误差灵敏度控制
Application of thin film errors sensitivity control concept to robust design of multilayer optical coatings
吴素勇 1龙兴武 1杨开勇1
作者信息
- 1. 国防科技大学光电科学与工程学院,长沙410073
- 折叠
摘要
Abstract
A robust design method of multilayer optical coatings based on optimal control of thin-film errors sensitivity is presented in this paper. An analytical calculation model of robust design merit function under statistic layer parameters' errors is established. It can avoid the computation errors of robust design merit function caused by limited number of layer parameters' errors simulation sample, and can avoid the long time consumption when large number of layer parameters' errors simulation samples is used. The effectiveness of the robust design method in thin film errors tolerance control is demonstrated by application to a variety of optical coatings, such as the broadband antireflection coating, neutral beam splitter and linear ramp transmittance filter. Results show that the robust design method owns an inherent fast computation characteristic and the designed film is insensitive to the monitoring thickness errors in deposition process. This method is of practical significance to improving the mass production yields and repetitive production of high quality optical coatings.关键词
薄膜/鲁棒设计/膜系误差灵敏度/解析模型Key words
thin film/ robust design/ thin-film errors sensitivity/ analytic model分类
数理科学引用本文复制引用
吴素勇,龙兴武,杨开勇..光学薄膜鲁棒设计中膜系误差灵敏度控制[J].强激光与粒子束,2012,24(10):2391-2399,9.
