强激光与粒子束2012，Vol.24Issue(11)：2631-2636,6.DOI:10.3788/HPLPB20122411.2631
提高多层介质膜脉宽压缩光栅阈值的清洗方法
Cleaning method for improving laser induced damage threshold of multilayer dielectric pulse compressor gratings
摘要
Abstract
Oxygen plasma and HPM solution (mixtures of hydrochloric acid,hydrogen peroxide,and deionized water) were applied to cleaning the multilayer dielectric (MLD) pulse compressor gratings.X-ray photoelectron spectroscopy was carried out to evaluate surface cleanliness of the gratings.It is found that photoresist and fluorocarbon residues can be efficiently removed with oxygen-plasma cleaning and metal contaminants can be completely removed with HPM cleaning.After cleaning processes,the typical diffraction efficiencies in -1st reflected order are maintained larger than 95.0％ at an incidence of 66.4° in TE polarization,and the laser induced damage threshold (LIDT) for 10 ps laser pulse at 1053 nm is greatly improved to 1.6 J/cm2.The cleaning method using oxygen plasma and HPM solution can efficiently make the surface clean and therefore enhance the LIDT of MLD gratings.关键词
多层介质膜光栅/HPM溶液/激光诱导损伤阈值Key words
multilayer dieiectric gratings/HPM solution/laser induced damage threshold分类
机械制造引用本文复制引用
陈上碧,盛斌,邱克强,刘正坤,徐向东,刘颖,洪义麟,付绍军..提高多层介质膜脉宽压缩光栅阈值的清洗方法[J].强激光与粒子束,2012,24(11):2631-2636,6.基金项目
Supported by National High Technology Research and Development Program of China （）
