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飞秒脉冲烧蚀单晶硅的超快动力学

任欢 王俊波 邱荣 周强 刘浩 马平

强激光与粒子束2012,Vol.24Issue(12):2787-2790,4.
强激光与粒子束2012,Vol.24Issue(12):2787-2790,4.DOI:10.3788/HPLPB20122412.2787

飞秒脉冲烧蚀单晶硅的超快动力学

Ultrafast dynamics of intense femtosecond laser ablation of silicon

任欢 1王俊波 1邱荣 1周强 1刘浩 2马平2

作者信息

  • 1. 西南科技大学-中国工程物理研究院激光聚变中心 极端条件物质特性联合实验室,四川绵阳621010
  • 2. 中国工程物理研究院激光聚变研究中心,四川绵阳621900
  • 折叠

摘要

Abstract

The dynamic process of intense 50 fs laser ablation of silicon is investigated by the way of ultrafast time-resolved shadowgraph. The formation and development processes of plasma and shock wave are recorded, and it is known that the process of material ejection is discontinuous. The process can be divided obviously into two processes, which shows that at different stages there are different mechanism leading the interaction of laser and material. In the shadowgraph of 19 ns time delay, it is found that the shock wave is distorted from the hemispherical shape.

关键词

飞秒激光/时间分辨阴影图/烧蚀/冲击波

Key words

femtosecond laser/ time-resolved shadowgraphs/ laser ablation/ shock wave

分类

数理科学

引用本文复制引用

任欢,王俊波,邱荣,周强,刘浩,马平..飞秒脉冲烧蚀单晶硅的超快动力学[J].强激光与粒子束,2012,24(12):2787-2790,4.

基金项目

国家自然科学基金委员会-中国工程物理研究院联合基金项目(10976025) (10976025)

西南科技大学极端条件物质特性实验室开放基金项目(11zxjk09) (11zxjk09)

强激光与粒子束

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