强激光与粒子束2012，Vol.24Issue(12)：2911-2914,4.DOI:10.3788/HPLPB20122412.2911
材料表面处理用强流电子回旋共振离子源
Electron cyclotron resonance ion source for material surface treatment
明建川 1郭之虞 1彭士香1
作者信息
- 1. 北京大学核物理与核技术国家重点实验室,北京100871
- 折叠
摘要
Abstract
A 2. 45 GHz electron cyclotron resonance ion source with permanent magnets has been developed. Its outline dimension is 160 mm in diameter and 90 mm in height, the discharge chamber's dimension is 70 mm in diameter and 50 mm in he-hight. The microwave window is made of a φ50 mm×10 mm BN disk and two φ30 mm×10 mm ceramic disks. This ion source adopts a three-electrode extraction system and works in the pulsed mode. When the microwave input power is 300 W, the air inflow is 0. 4 mL/min, a more than 30 mA peak current of the nitrogen beam can be extracted from a 5 mm emission aperture at 100 kV extraction voltage. The diameter of the beam uniform area on the working plane is more than 200 mm.关键词
电子回旋共振离子源/微波窗/表面处理/引出系统Key words
electron cyclotron resonance ion source/ microwave window/ surface treatment/ surface treatment/ extraction system分类
能源科技引用本文复制引用
明建川,郭之虞,彭士香..材料表面处理用强流电子回旋共振离子源[J].强激光与粒子束,2012,24(12):2911-2914,4.
