Fabrication of SiC nanowire thin-film transistors using dielectrophoresisOACSCDCSTPCD
Fabrication of SiC nanowire thin-film transistors using dielectrophoresis
The selection of solvents for SiC nanowires (NWs) in a dielectrophoretic process is discussed theoretically and experimentally.From the viewpoints of dielectrophoresis force and torque,volatility,as well as toxicity,isopropanol (IPA) is considered as a proper candidate.By using the dielectrophoretic process,SiC NWs are aligned and NW thin films are prepared.The densities of the aligned SiC NWs are 2 μm-1,4 μm-1,6 μm-1,which corresponds to SiC NW concentratio…查看全部>>
Dai Zhenqing;Zhang Liying;Chen Changxin;Qian Bingjian;Xu Dong;Chen Haiyan;Wei Liangming;Zhang Yafei
Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, ChinaDepartment of Physics and Chemistry, Hebei Normal University of Science and Technology, Qinhuangdao 066004, ChinaKey Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, ChinaKey Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, ChinaKey Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, ChinaKey Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, ChinaKey Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, ChinaKey Laboratory for Thin Film and Microfabrication of the Ministry of Education, Research Institute of Micro and Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200240, China
dielectrophoresis SiC nanowires thin-film transistors
dielectrophoresis SiC nanowires thin-film transistors
《半导体学报（英文版）》 2012 (11)
场效应纳米器件中表面/界面的行为与控制
37-42,6
Project supported by the National Natural Science Foundation of China (Nos.50730008,60807008) and the Doctoral Fund of Hebei Normal University of Science and Technology,China (No.2009YB007).
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