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Modeling of subthreshold characteristics for undoped and doped deep nanoscale short channel double-gate MOSFETs

Jin Xiaoshi Liu Xi Wu Meile Chuai Rongyan Jung-Hee Lee Jong-Ho Lee

半导体学报(英文版)2012,Vol.33Issue(12):27-30,4.
半导体学报(英文版)2012,Vol.33Issue(12):27-30,4.DOI:10.1088/1674-4926/33/12/124003

Modeling of subthreshold characteristics for undoped and doped deep nanoscale short channel double-gate MOSFETs

Modeling of subthreshold characteristics for undoped and doped deep nanoscale short channel double-gate MOSFETs

Jin Xiaoshi 1Liu Xi 1Wu Meile 1Chuai Rongyan 1Jung-Hee Lee 2Jong-Ho Lee3

作者信息

  • 1. School of Information Science and Engineering, Shenyang University of Technology, Shenyang 110870, China
  • 2. School of EECS, Kyungpook National University, 1370 Sangyuk-Dong Buk-Gu, Daegu 702-701, Korea
  • 3. School of EECS Eng.and ISRC(Inter-University Semiconductor Research Center), Seoul National University, Shinlim-Dong,Kwanak-Gu, Seoul 151-742, Korea
  • 折叠

摘要

Abstract

A model of subthreshold characteristics for both undoped and doped double-gate (DG) MOSFETs has been proposed.The models were developed based on solution of 2-D Poisson's equation using variable separation technique.Without any fitting parameters,our proposed models can exactly reflect the degraded subthreshold characteristics due to nanoscale channel length.Also,design parameters such as body thickness,gate oxide thickness and body doping concentrations can be directly reflected from our models.The models have been verified by comparing with device simulations' results and found very good agreement.

关键词

double-gate/ MOSFETs/ deep nanoscale/ modeling

Key words

double-gate/ MOSFETs/ deep nanoscale/ modeling

引用本文复制引用

Jin Xiaoshi,Liu Xi,Wu Meile,Chuai Rongyan,Jung-Hee Lee,Jong-Ho Lee..Modeling of subthreshold characteristics for undoped and doped deep nanoscale short channel double-gate MOSFETs[J].半导体学报(英文版),2012,33(12):27-30,4.

基金项目

Project supported by the Fund of Liaoning Province Education Department (No.L2012028). (No.L2012028)

半导体学报(英文版)

OACSCDCSTPCDEI

1674-4926

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