东南大学学报（自然科学版）2012，Vol.42Issue(6)：1117-1121,5.DOI:10.3969/j.issn.1001-0505.2012.06.018
基于EIT技术的气流传感器及其实验研究
Gaseous flow sensor based on EIT and its experimental study
摘要
Abstract
A novel structure of micro-electro-mechanical gaseous flow sensor based on electrical impedance tomography (EIT) is developed. The gaseous flow sensor consists of a silicon film over the heater and 16 metal electrodes surrounding the film. First, the excitation current is injected through a couple electrode and voltages are measured between other electrodes. Then, the sites of the electrodes of current are changed and the voltages are measured again. 208 voltage values are obtained. Finally, these values of the currents and voltages are transformed to the resistivity distribution image by using imaging software. The change of thermal field by gas flowing can induce the distribution change of the film' s resistivity. The experiment results show that the change of the speed and direction of flow can be truly and clearly described with images, which provides a novel method and technique for the design of micro-electro-mechanical gaseous flow sensor.关键词
电阻抗断层成像/微机电气流传感器/电阻率分布图像Key words
electrical impedance tomography (EIT)/ micro-electro-mechanical gaseous flow sensor/ resistivity distribution image分类
信息技术与安全科学引用本文复制引用
蒋明霞,李伟华,张良,葛宇昊..基于EIT技术的气流传感器及其实验研究[J].东南大学学报（自然科学版）,2012,42(6):1117-1121,5.基金项目
国家高技术研究发展计划(863计划)资助项目(2009AA04Z322). （863计划）
