发光学报2012，Vol.33Issue(11)：1232-1235,4.DOI:10.3788/fgxb20123311.1232
柔性衬底上ALD法低温制备的ZnO薄膜的光学和电学特性
The Optical and Electrical Properties of ZnO Films Grown on Flexible Substrate at Low Temperature by ALD
摘要
Abstract
ZnO films were grown on flexible substrate by the atomic layer deposition (ALD) using diethyl zinc (DEZn) as a metal precursor and water as a reactant.AFM,XRD and HALL effect were used to investigate the morphology,structural and electrical properties of the films.PL spectrum was measured for optical property.With the increasing temperature,the crystal quality and optical property of the films were improved.When grown at 170 ℃,the films exhibited c-axis orientation,the electron concentration was 5.62 × 1019 and the electron mobility was 28.2 cm2 · V-1.s-1.关键词
ZnO/ALD/生长温度/柔性衬底Key words
ZnO/ ALD/ growth temperature/ flexible substrate分类
数理科学引用本文复制引用
李晓妮,方芳,方铉,陈新颖,魏志鹏,李金华,楚学影,王晓华..柔性衬底上ALD法低温制备的ZnO薄膜的光学和电学特性[J].发光学报,2012,33(11):1232-1235,4.基金项目
国家自然科学基金(61006065,61076039,61204065,61205193,10804071) （61006065,61076039,61204065,61205193,10804071）
吉林省科技发展计划(20090139,20090555,20121816,201201116) （20090139,20090555,20121816,201201116）
高功率半导体激光国家重点实验室基金(9140C310101120C031115) （9140C310101120C031115）
高等学校博士学科点专项科研基金(21022216110002,20102216110001,20112216120005) （21022216110002,20102216110001,20112216120005）
吉林省自然科学基金(20101546) （20101546）
吉林省教育厅项目(2011JYT05,2011JYT10,2011JYT11) （2011JYT05,2011JYT10,2011JYT11）
长春市国际科技合作计划项目(2010CC02) （2010CC02）
吉林农业大学科研启动基金(201238)资助项目 （201238）
