发光学报2012，Vol.33Issue(11)：1264-1267,4.DOI:10.3788/fgxb20123311.1264
液相沉积法制备的二氧化硅薄膜及其钝化性能
SiO2 Film Synthesized by Liquid Phase Deposition and Its Passivation Performance
摘要
Abstract
The SiO2 film has been successfully synthesized by liquid phase deposition (LPD) method. The microstructure and passivation performance of the SiO2 film have been investigated by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and microwave photoconduc-tive decay (Μ-PCD). The results show that the deposited SiO2 film contains a little amount of F element and it is very smooth and dense. The reflectance and surface recombination velocity reduced to 10. 88% and 2 830 cm/s, respectively.关键词
液相沉积/二氧化硅薄膜/钝化Key words
liquid phase deposition/ SiO2 film/ passivation分类
数理科学引用本文复制引用
刘邦武,钟思华,何静,夏洋,李超波..液相沉积法制备的二氧化硅薄膜及其钝化性能[J].发光学报,2012,33(11):1264-1267,4.基金项目
国家自然科学基金(61106060) （61106060）
中国科学院知识创新工程重大项目(Y2YF028001) （Y2YF028001）
国家高技术研究发展计划(2012AA052401)资助项目 （2012AA052401）
