化学工程2012，Vol.40Issue(12)：75-78,4.DOI:10.3969/j.issn.1005-9954.2012.12.018
冷氢化工艺中四氯化硅汽化方式的比较
Comparative study of silicon tetrachloride vaporization in hydrogenation process
姚又省 1刘继三 1陈维平1
作者信息
- 1. 华陆工程科技有限责任公司,陕西西安710065
- 折叠
摘要
Abstract
The hydrogenation in the process of polysilicon production was briefly introduced, and four vaporization methods of silicon tetrachloride were mainly illustrated, including electrical heating vaporization, thermal oil vaporization, unforced mixture vaporization and forced mixture vaporization. The advantages and disadvantages of these methods were contrasted, which can provide reference for polysilicon plants and polysilicon process design.关键词
多晶硅/冷氢化/四氯化硅/汽化Key words
polysilicon/ hydrogenation/ silicon tetrachloride/ vaporization分类
化学化工引用本文复制引用
姚又省,刘继三,陈维平..冷氢化工艺中四氯化硅汽化方式的比较[J].化学工程,2012,40(12):75-78,4.
