计量学报2012，Vol.33Issue(5)：395-399,5.DOI:10.3969/j.issn.1000-1158.2012.05.03
自适应系统在单频激光干涉仪上的应用研究
Application Research of Self-adaptation System on Single-frequency Laser Interferometer
摘要
Abstract
To analyze the equal inclination fringe on focal plane in single-frequency laser interferometer and random noise of environmental factors, a self-adaptation system was developed. The fourth-order cumulant method, signal filtering method and direct current component distilling method are adopted. The experimental results show that, the noise of the signal can be disposed by this system,so the direct current component can be distilled. Accordingly, high-precision tracking to the direct current component is achieved. By installing the self-adaptation system on single-frequency laser interferometer in operation environment, its linear measuring accuracy achieves 0. 9 × 10-6 L, and measurement reproducibility is 0. 09μm.关键词
计量学/自适应/单频激光干涉仪/直流分量/等倾干涉条纹能量Key words
Metrology/ Self-adaptation/ Single-Frequency laser/ Direct current component/ Equal inclination fringe分类
通用工业技术引用本文复制引用
黄雷,马宏,马钟焕,尹子..自适应系统在单频激光干涉仪上的应用研究[J].计量学报,2012,33(5):395-399,5.基金项目
吉林省质量技术监督局立项项目 （）
