量子电子学报2012，Vol.29Issue(6)：759-763,5.DOI:10.3969/j.issn.1007-5461.2012.06.017
脉冲激光沉积法沉积类金刚石薄膜的实验研究
Experimental investigation of diamond-like carbon films deposited by pulsed laser deposition
摘要
Abstract
In order to investigate influence of the substrate temperature and distance on diamond-like carbon (DLC) films in the pulsed laser deposition (PLD), firstly the temperature was kept at 200 C to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively, secondly the temperature was kept at 400 C to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively. The microstructure of DLC films was detected by the visible Raman spectroscopy. The topography of DLC films was detected by the atomic force microscopy (AFM). The experimental result demonstrates that ratio of sp3 /sp2 and the density of DLC film decrease and size and number of graphitic crystallites increase when the temperature or distance increases. The smaller is the distance, the bigger is the influence of temperature on the microstructure of DLC film. The lower is the temperature, the bigger is the influence of the distance on the microstructure. The distance and temperature should influence topography of DLC film obviously.关键词
激光技术/脉冲激光沉积法/类金刚石薄膜/微观结构/表面形貌Key words
laser techniques/ pulsed laser deposition/ diamond-like carbon film/ microstructure/ topography分类
信息技术与安全科学引用本文复制引用
罗乐,赵读亮,储雅琼,汪毅,马跃,陶汝华..脉冲激光沉积法沉积类金刚石薄膜的实验研究[J].量子电子学报,2012,29(6):759-763,5.基金项目
中科院百人计划项目 （）
