半导体学报（英文版）2013，Vol.34Issue(2)：129-132,4.DOI:10.1088/1674-4926/34/2/026001
A multivariate process capability index with a spatial coefficient
A multivariate process capability index with a spatial coefficient
摘要
Abstract
After analyzing the multivariate Cpm method (Chan et al.1991),this paper presents a spatial multivariate process capability index (PCI) method,which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality.Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.关键词
process/ process capability index/ multivariate/ off-centerKey words
process/ process capability index/ multivariate/ off-center引用本文复制引用
Wang Shaoxi,Wang Mingxin,Fan Xiaoya,Zhang Shengbing,Han Ru..A multivariate process capability index with a spatial coefficient[J].半导体学报（英文版）,2013,34(2):129-132,4.基金项目
Project supported by the Natural Science Foundation of Shaanxi Province (No.2012JQ8048) and the Basic Research Foundation of Northwestern Polytechnical University (No.JC20110232). （No.2012JQ8048）
