传感技术学报2012，Vol.25Issue(12)：1627-1630,4.DOI:10.3969/j.issn.1004-1699.2012.12.001
覆盖聚合物敏感膜的水平剪切型声表面波气体传感器机理分析
Theoretical Analysis on Response Mechanism of Polymer-Coated Shear Horizontal Surface Acoustic Wave Gas Sensor
摘要
Abstract
The response mechanism of polymer-coated shear horizontal surface acoustic wave (SH-SAW) sensor was analyzed based on the perturbation approach. Using fluoropolyol ( FPOL) as the sensitive detector for organophosphorus agents,the sensor response of the gas adsorption was analyzed as a function of the thickness of the polymer and the operating frequency of SH-SAW device. Calculation results indicate that the SH-SAW gas sensor has non-linear response for various concentrations of dimethyl methylphosphonate ( DMMP) with different FPOL thickness and operating frequency. To obtain a monotone gas sensor response and low acoustic attenuation, the optimal parameters including the FPOL thickness and the operating frequency were determined theoretically.关键词
气体传感器/响应机理/水平剪切型声表面波/聚合物敏感膜Key words
gas sensor/response mechanism/shear horizontal surface acoustic wave/polymer sensitive film分类
信息技术与安全科学引用本文复制引用
谢晓,王文,刘明华,何世堂..覆盖聚合物敏感膜的水平剪切型声表面波气体传感器机理分析[J].传感技术学报,2012,25(12):1627-1630,4.基金项目
国家自然科学基金重点项目(10834010) （10834010）
国家自然科学基金项目(11074268) （11074268）
