传感技术学报2012，Vol.25Issue(12)：1648-1652,5.DOI:10.3969/j.issn.1004-1699.2012.12.005
两种结构MEMS磁场传感器的研究
Study on MEMS Magnetic Sensors of Two Different Structures
摘要
Abstract
Resonant magnetic field sensors with two different structures are studied. The magnetic field is obtained by measuring the induced electromotive voltage of the coil of the mechanical structure. The working principles of the sensor are introduced first,and the force and response of the sensor are developed using the vibration theory. Then the structural model is established and the vibration amplitudes are simulated using the finite element software simulation. These micro-electro-mechanical systems ( MEMS) devices are realized through a standard CMOS process coupled with a post-processing phase. A laser Doppler vibrometer system is implemented to measure the vibration amplitudes of the fabricated structure. The performances of two sensors are compared and a good agreement is observed between the predicted and observed behavior of the magnetic field sensor. The sensor is of simple structure and easy fabrication demonstrating their utility as a magnetic field of mT level.关键词
磁场传感器/MEMS/洛仑兹力/谐振Key words
magnetic sensor/ MEMS/ Lorentz force/ resonate分类
信息技术与安全科学引用本文复制引用
陈洁..两种结构MEMS磁场传感器的研究[J].传感技术学报,2012,25(12):1648-1652,5.基金项目
国家自然科学基金项目(61201032) （61201032）
