光学精密工程2013，Vol.21Issue(1)：108-114,7.DOI:10.3788/OPE.20132101.0108
大时间热响应常数投影物镜的超高精度温度控制
High precision temperature control for projection lens with long time thermal response constant
摘要
Abstract
A feedforword-cascade water cooling control system is presented to meet the requirements of a projection lens in a high-resolution optical lithography for the fast convergence and high performance temperature control. The system takes an objective as the primary control object and the cooling water as a secondary control object. According to the slow dynamic temperature response characteristics of the projection lens, model predictive control is adopted as the outer loop main control algorithm. On the basis of the large time-delay problems of a cooling water circuit, the PID control with a Smith predictor is used as the inner loop auxiliary control algorithm. To overcome the serious disturbance in optical lithography at different operating status, the feedforward compensation is introduced to control the laser thermal interference. Finally, the temperature control experiment for the objective is simulated under the conditions of different control structures and thermal interferences. The results show that the stable-state error curve of the objective is in the ±0. 01 ℃. The control experimental results demonstrate that the method has fast convergence and strong anti-interference, and meets the requirements of the projection lens for ultra-precision temperature control. e关键词
投影物镜/温度控制/串级控制/大时滞/模型预测/前馈补偿Key words
projection lens/ temperature control/ cascade control/ long time delay/ model prediction/feedforward compensation分类
信息技术与安全科学引用本文复制引用
秦硕,巩岩,袁文全,杨怀江..大时间热响应常数投影物镜的超高精度温度控制[J].光学精密工程,2013,21(1):108-114,7.基金项目
国家02专项基金资助项目(No.2009ZX02005) （No.2009ZX02005）
