光学精密工程2013，Vol.21Issue(2)：260-266,7.DOI:10.3788/OPE.20132102.0260
用空间载频法测量玻璃平板的厚度均匀性
Measurement of thickness uniformity for glass plate by spatial carrier
摘要
Abstract
On the basis of the Michelson interferometer, a phase interference measurement system with one single arm as the measurement output port was designed to measure and analyze the thickness uniformity of a glass plate. In the system, a CCD camera was used to collect the interference pattern and the Fourier transform fringe analysis and phase unwrapping techniques were used to extracted the phase information contained in the interference pattern. For the problem that the sidelobe center of Fourier transform spectrum could not be accurately located, an applicable triangular transformation method was proposed to extract the volume of phase change directly. With this approach, the phase results could be obtained more accurately without knowing the central location of the spectral side-lobe, meanwhile, the errors induced by man-made estimation and the small carrier frequency component in vertical axis were eliminated. The thickness uniformity of a group of glass plates was measured in both of the length and width directions. The experimental results show that the theoretical accuracy is 0.93% and 0.92% in two directions, respectively, when they measured by a CCD camera with a unit size of 4.65 μm×4.65 μm. The system can measure the thickness uniformity of the glass plates, and has lower demands for the location accuracy of frequency spectral sidelobe and the direction precision of carrier frequency.关键词
干涉测量/玻璃平板检测/厚度测量/傅里叶变换法/空间载频Key words
interferometry/ glass plate detection/ thickness measurement/ Fourier transform method/ spatial carrier分类
数理科学引用本文复制引用
蔡怀宇,李宏跃,朱猛,黄战华..用空间载频法测量玻璃平板的厚度均匀性[J].光学精密工程,2013,21(2):260-266,7.基金项目
高等学校博士点专项科研基金资助项目(No.20110032120059) （No.20110032120059）
