南京理工大学学报（自然科学版）2012，Vol.36Issue(6)：957-961,983,6.
基于前馈控制的压电单轴实时位移控制系统
Feed-forward Control Oriented Real-time Displacement Controller for Single-axis Piezo Actuator
摘要
Abstract
To meet the demands on real time performances and accuracies of micro machining, ultra precision machining, etc, a feed-forward control oriented real-time single-axis micro displacement controller by piezo actuator is suggested with an embedded processor. The hysteresis and step response models of piezo actuator are built, and the realization of reverse Preisach model are suggested. Using the reverse Preisach model as a feed-forward control unit and the proportional-integral( PI)controller as a feedback control unit,a compound controller is developed. A real-time single-axis micro displacement controller with the above-mentioned models is achieved with a 32-bit embedded processor, S3C2410. System tests indicate that;as for the step response,the steady state error is less than 0.15 μn,the settling time is about 1.2 ms and the overshoot is about 10% ; as for the sinusoidal response, the displacement error is ranged from -0.41 μm to 0.45 μm,which is about ±1.5% ;with the controller built above,the precise,real-time displacement control in multi-research fields can be achieved.关键词
前馈控制/实时控制/嵌入式系统/压电致动器Key words
feed-forward control/ real-time control/ embedded system/ piezo actuators分类
信息技术与安全科学引用本文复制引用
张建华,李宏胜,葛红宇,滕福林..基于前馈控制的压电单轴实时位移控制系统[J].南京理工大学学报（自然科学版）,2012,36(6):957-961,983,6.基金项目
江苏省自然科学基金(BK2009350) （BK2009350）
江苏省高校自然科学基金(09KJB460005) （09KJB460005）
