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2.0μm波段Sb基多量子阱材料的制备

李占国 尤明慧 邓昀 刘国军 李林 高欣 曲轶 王晓华

强激光与粒子束2013,Vol.25Issue(2):505-507,3.
强激光与粒子束2013,Vol.25Issue(2):505-507,3.DOI:10.3788/HPLPB20132502.0505

2.0μm波段Sb基多量子阱材料的制备

Fabrication of 2.0 μm Sb-based multi-quantum-well materials

李占国 1尤明慧 1邓昀 2刘国军 1李林 1高欣 1曲轶 1王晓华1

作者信息

  • 1. 长春理工大学高功率半导体激光国家重点实验室,长春130022
  • 2. 空军航空大学基础部,长春130022
  • 折叠

摘要

Abstract

This paper studies parameters of InGaAsSb/AlGaAsSb multi-quantum-well (MQW) materials grown by molecular beam epitaxy(MBE), including the growth rate, growth temperature and flux for high quality MQW materials, respectively. As well, characterization of the epi-layers by X-ray diffraction (XRD) indicates high uniformity and excellent crystalline quality with satellite peaks. Emitting wavelength is about 2. 0μm measured by photoluminescence(PL) at room temperature (RT). The excellent crystalline quality and optical characteristic are obtained through optimization of growth conditions and structure parameters. The threshold current of the fabricated device is about 300 mA, the output power is 22 mW at room temperature.

关键词

多量子阱/分子束外延/中红外波段

Key words

multiple-quantum-well/ molecular beam epitaxy/ mid-infrared

分类

数理科学

引用本文复制引用

李占国,尤明慧,邓昀,刘国军,李林,高欣,曲轶,王晓华..2.0μm波段Sb基多量子阱材料的制备[J].强激光与粒子束,2013,25(2):505-507,3.

基金项目

国家自然科学基金项目(61006039,60976056) (61006039,60976056)

总装预研基金项目(232760) (232760)

强激光与粒子束

OA北大核心CSCDCSTPCD

1001-4322

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