人工晶体学报2012,Vol.41Issue(6):1519-1523,5.
共蒸发三步法制备CIGS薄膜的相变过程
Phase Transformation of CIGS Film Prepared by Co-evaporation "Three-stage Process"
摘要
Abstract
In this paper, Cu(In, Ga)Se2(CIGS) thin film via co-evaporation "three-stage process" has been investigated. The Cu-compound transformation process of " three-stage process" is the key problem for the high-quality absorb. The phase transformation from Cu-poor film to Cu-rich was concluded by XRD, XRF and SEM results.关键词
CIGS薄膜/共蒸发三步法/相变过程Key words
CIGS film/ co-evaporation " three-stage process" / phase transformation分类
数理科学引用本文复制引用
刘芳芳,张力,何青..共蒸发三步法制备CIGS薄膜的相变过程[J].人工晶体学报,2012,41(6):1519-1523,5.基金项目
国家自然科学基金(61144002) (61144002)
中央高校基本科研业务费专项资金(65010351) (65010351)