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共蒸发三步法制备CIGS薄膜的相变过程

刘芳芳 张力 何青

人工晶体学报2012,Vol.41Issue(6):1519-1523,5.
人工晶体学报2012,Vol.41Issue(6):1519-1523,5.

共蒸发三步法制备CIGS薄膜的相变过程

Phase Transformation of CIGS Film Prepared by Co-evaporation "Three-stage Process"

刘芳芳 1张力 1何青1

作者信息

  • 1. 南开大学薄膜器件与技术研究所,天津300071
  • 折叠

摘要

Abstract

In this paper, Cu(In, Ga)Se2(CIGS) thin film via co-evaporation "three-stage process" has been investigated. The Cu-compound transformation process of " three-stage process" is the key problem for the high-quality absorb. The phase transformation from Cu-poor film to Cu-rich was concluded by XRD, XRF and SEM results.

关键词

CIGS薄膜/共蒸发三步法/相变过程

Key words

CIGS film/ co-evaporation " three-stage process" / phase transformation

分类

数理科学

引用本文复制引用

刘芳芳,张力,何青..共蒸发三步法制备CIGS薄膜的相变过程[J].人工晶体学报,2012,41(6):1519-1523,5.

基金项目

国家自然科学基金(61144002) (61144002)

中央高校基本科研业务费专项资金(65010351) (65010351)

人工晶体学报

OA北大核心CSCDCSTPCD

1000-985X

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