人工晶体学报2012，Vol.41Issue(6)：1549-1553,1560,6.
聚合物太阳电池ITO电极的光刻制备
Fabrication of ITO Electrode with Lithography for Polymer Solar Cells
刘桂林 1朱华新 1郭颖 1严慧敏 1李果华1
作者信息
摘要
Abstract
Using lithography method, an extremely fine ITO electrode could be obtained. A process of making ITO electrode by using lithography method is clarified by this paper, including superficial cleaning, exposure control, development control and etching process, a suitable lithography process were the 50 s exposure time, the development time were 50 s and a 20 s were used for chemical corrosion. Moreover, the etching process is studied in theoretical analysis, and the Optical Coherence Tomography ( OCT) technology was used for the observation of the electrodes.关键词
ITO电极/光刻/化学腐蚀/光学相干断层扫描Key words
ITO electrode/ lithography/ chemical corrosion/ OCT分类
信息技术与安全科学引用本文复制引用
刘桂林,朱华新,郭颖,严慧敏,李果华..聚合物太阳电池ITO电极的光刻制备[J].人工晶体学报,2012,41(6):1549-1553,1560,6.
