人工晶体学报2012，Vol.41Issue(6)：1561-1565,5.
不同电极对外延BiFeO3薄膜铁电性能的影响
Influence of Different Electrode on the Property of Epitaxial BiFeO3 Thin Film
摘要
Abstract
Epitaxial BiFeO3(BFO) thin film have been grown on SrRuO3/SrTiO3 (001) substrates by radio frequency magnetron sputtering. Ferroelectric, ferromagnetic, leakage current and its mechanisms were investigates with different metal and conductive oxide top electrode. X-ray diffraction measurement and Φ scan spectra indicates the formation of an epitaxial single-phase. BFO film is well crystallized. The remnant polarization (2Pr) of BFO film by Pt and Al top electrode are 68 μC/cm2. They are 44 μC/ cm2 by Pt /SRO and FePt top electrode at a coercive field (2Ec) of 370 ±20 kV/cm. The film has low leakage current density with largest of 1.94 × 10 -3 A/cm2 at 12 V and Poole-Frenkle emission is the main conduction mechanism in BFO film. Moreover, BFO thin film exhibits a weak ferromagnetic behavior with a saturation magnetization of 9.3 emu/cm3 and a coercive field of 338 Oe.关键词
BiFeO3/磁控溅射/铁电性/外延生长Key words
BiFeO3/ magnetron sputtering/ ferroelectric/ epitaxial growth分类
数理科学引用本文复制引用
马继奎,赵庆勋,彭增伟,陈明敬,史金超,刘保亭..不同电极对外延BiFeO3薄膜铁电性能的影响[J].人工晶体学报,2012,41(6):1561-1565,5.基金项目
国家自然科学基金(60876055,11074063) （60876055,11074063）
高等学校博士点基金(20091301110002) （20091301110002）
河北省自然科学基金(E2009000207,E2008000620,08B010) （E2009000207,E2008000620,08B010）
