人工晶体学报2012，Vol.41Issue(6)：1768-1771,4.
纳米非晶碳薄膜的制备及其场致电子发射特性
Synthesis and Field Emission Characteristics of the Amorphous Nano-carbon Films
摘要
Abstract
The amorphous nano-carbon films were synthesized on the crystalline silicon by microwave plasma enhanced chemical vapor deposition ( MPECVD) system. The surface morphology and the structure of the films were tested by scanning electron microscopy (SEM) , Raman scattering spectroscopy and XRD. The field emission characteristics were measured. The results showed that the turn-on field was only 0.39 V/μm, the current density of 3.06 mA/cm2 was obtained when the electric field was 1. 85 V/μm, and the luminous spots were symmetrical, serried and steady. The work function of the films was calculated by an iterative method, which was only 3.1 eV. The emission sites density could reach 1. 7 × 105 cm-2. All these results indicate that the amorphous nano-carbon films are very promising for field emission applications.关键词
纳米非晶碳/场致电子发射/FeCl3/微波等离子增强化学气相沉积Key words
amorphous nano-carbon films/ filed emission/ FeCl3/ MPECVD分类
数理科学引用本文复制引用
袁泽明,张永强,姚宁,张兵临..纳米非晶碳薄膜的制备及其场致电子发射特性[J].人工晶体学报,2012,41(6):1768-1771,4.基金项目
国家自然科学基金(61076041) （61076041）
教育部科学技术研究重点项目(205091) （205091）
河南省科技攻关项目(0624250014) （0624250014）
