物理学报2013，Vol.62Issue(1)：441-447,7.DOI:10.7498/aps.62.017802
等离子体增强化学气相沉积法制备含氢类金刚石膜的紫外Raman光谱和X射线光电子能谱研究
UV Raman and XPS studies of hydrogenous diamond-like carbon films prepared by PECVD
摘要
Abstract
The hydrogenous diamond-like carbon (DLC) films deposited on Si substrates using pulsed glow discharge method are investigated using Raman spectroscopy and X-ray photoelectron spectroscopy method. The UV Raman spectrum for excitation wavelength is 325 nm. UV Raman is particularly useful for hydrogenous DLC, as it gives clear measurements in the D and G peak spectral region even for highly hydrogenated samples, for which the visible Raman spectra are overshadowed by photoluminescence. The sp3 bonding of hydrogenous DLC film can be effectively studied by X-ray photoelectron spectroscopy method, and the data from the X-ray photo-electron spectroscopy method are compared with Raman results. It is found that G peak shows a shift to ward a higher wave under UV excitation. For the G peak, I(D)/I(G), G-FWHM and sp3, there exists a relationship among them.关键词
脉冲辉光放电/类金刚石膜/Raman光谱/X-射线光电子能谱Key words
pulsed glow discharge, DLC/ Raman spectrum/ X-ray photoelectron spectroscopy引用本文复制引用
杨发展,沈丽如,王世庆,唐德礼,金凡亚,刘海峰..等离子体增强化学气相沉积法制备含氢类金刚石膜的紫外Raman光谱和X射线光电子能谱研究[J].物理学报,2013,62(1):441-447,7.基金项目
国家自然科学基金(批准号:10975050)资助的课题. （批准号:10975050）
