中国机械工程2013，Vol.24Issue(5)：585-588,609,5.DOI:10.3969/j.issn.1004-132X.2013.05.004
一种低成本微定位平台的设计与仿真
Design and Simulation of a Low-cost Micro-positioning Stage
摘要
Abstract
To meet the demands of low-cost and high accuracy for the micro-positioning system in the fields of such as semiconductor and micro/nano manufacturing, a low-cost micro-positioning stage was proposed based on differential lever mechanisms with flexure hinge, which utilized macro- displacement and low accuracy input will realize micro-displacement and high accuracy ouput. First, the macro-displacement of the actuator was scaled down to realize micro-displacement ouput by designing a zooming mechanism, thus reducing the cost of this stage. Second, the stiffness of this stage was analyzed, and two different flexure hinges were presented according to different load distributions in the positioning mechanisms. Finally, a finite element model of the stage was established, and the stress of the stage was analyzed using ANSYS software. In addition, the output displacement of this micro -positioning stage was implemented by simulation analysis. Simulation results show such a micro-positioning stage is feasible.关键词
微定位平台/低成本/高精度/差式杠杆机构Key words
micro-positioning stage/ low-cost/ high accuracy/ differential lever mechanism分类
机械制造引用本文复制引用
卢清华,吴志伟,范彦斌,张宪民..一种低成本微定位平台的设计与仿真[J].中国机械工程,2013,24(5):585-588,609,5.基金项目
国家自然科学基金资助项目(51105077) （51105077）
广东省自然科学基金资助项目(S2011010001218) （S2011010001218）
广东省教育厅科技创新项目(2012KJCX0103) （2012KJCX0103）
佛山市科技发展专项资金资助项目(FZ2010036) （FZ2010036）
广东省精密装备与制造技术重点实验室开放基金资助项目 （）
