江西科学2012，Vol.30Issue(6)：784-787,805,5.
纳米硅薄膜太阳能电池的制备及特性研究
The Preparation and Properties Study of the Silicon Nanocrystals Film Solar Cell
摘要
Abstract
We study the properties of the monocrystalline, polycrystalline, microc~Tstalline, thin film solar cell, and introduce the development of silicon solar cell. The plasma enhanced chemical vapor deposition method and deposition theory on silicon thin film solar cell are discussed by us. The per- formanc influence of the H dilution concentration on silicon nanocrystals film solar cell is demonstra- ted. It is reported on the correlation of the film performance and the deposition pressure and the sub- strate temperature. Finally, we discussed the application of the transparent conductive film in the thin film solar cell the and their optical properties.关键词
纳米硅薄膜/等离子体增强化学气相沉积/沉积理论/性能Key words
Nanocrystals silicon thin films/PECVD/Deposition theory/Property分类
信息技术与安全科学引用本文复制引用
吴闺生,欧阳晓芳,李荣,刘澄宇,查国君,刘波,朱桂新..纳米硅薄膜太阳能电池的制备及特性研究[J].江西科学,2012,30(6):784-787,805,5.基金项目
江西省教育厅青年基金项目（编号：GJJ11258）. （）
