南通大学学报：自然科学版2012，Vol.11Issue(4)：7-12,6.
高温后退火对薄膜太阳能电池光电性能的影响
Effect of Post-Annealing Process on the Amorphous Silicon Thin Film Solar Cell Photoelectric Properties
摘要
Abstract
With the help of SILVACO, simulation of post growth annealing is probed on the non silicon thin film solar cell with the concentration of 1 × 10^16 cm^-3 N-type impurity and 1 × 10^17 cm^-3 P-type impurity. The results show that the post-growth annealing process can effectively improve the spectrum response property of the solar cell with the post-growth annealing temperature rising and the post-growth annealing time increasing. Compared with non- post-growth annealing solar cell, the battery I~ improves about 5.39% with the annealing temperature of 900 ℃, 950 ℃ and 1 000 ℃in 1 rain;the battery Iac increases about 6.37% with the annealing time increasing from 1 to 5 min and the annealing temperature keeping 950 ℃. However, the improvement of the solar cell spectrum property is not proportional to the post-growth annealing process parameters. To minimize the influence of impurity redistribution, the best post-growth annealing parameters are determinedconcluded as 950℃ and 4 min. It is confirmed that the integration of post-growth annealing in manufacuring thin film solar cell can improve the spectrum response property of it effectively.关键词
后退火/非晶硅薄膜太阳能电池/光电性能/光谱响应Key words
post-annealing/amorphous silicon thin film solar cell/spectrum response/photoelectric properties分类
信息技术与安全科学引用本文复制引用
李志锋,郭宏亮,周雨薇,王强,章国安,张竹青..高温后退火对薄膜太阳能电池光电性能的影响[J].南通大学学报：自然科学版,2012,11(4):7-12,6.基金项目
国家自然科学基金项目 （）
南通市重大科技创新专项 （）
南通市应用研究计划项目 （）
江苏省高等学校大学生实践创新训练计划项目 （）
