中国机械工程2012，Vol.23Issue(14)：1645-1650,6.
基于自感知压电换能器的键合质量检测方法研究
Monitoring Wire Bonding Quality Based on Self--sensing Transducer of Bonding System
摘要
Abstract
Using the coupling signals of PZT as the information carrier for monitoring the bonding process,the feature extraction, pattern recognition, and practical application of the coupling signals were investigated. According to the three key bonding processes of remove the oxide film, the bonding point plastic deformation,stress diffusion,a new feature extraction method based on the sub band en- velope segmentation was proposed to characterizing the transient ultrasonic coupling signals. To elimi- nate the irrelevant information of original feature variables, the principal component analysis (PCA) method was used for the feature selection. With the proposed method, the data acquired from fault bonding states were analyzed. The results demonstrate that the proposed method can identify the wire break bonding conditions effectively and predict the bond shear test strength.关键词
超声键合/键合质量/特征提取/自感知压电换能器Key words
ultrasonic wire bonding/bonding quality/feature extraction/self-- sensing piezoelectrictransducer(PZT)分类
信息技术与安全科学引用本文复制引用
冯武卫,张玉莲,孟庆丰..基于自感知压电换能器的键合质量检测方法研究[J].中国机械工程,2012,23(14):1645-1650,6.基金项目
基金项目：国家自然科学基金资助项目 （）
浙江海洋学院科研启动经费资助项目 （）
