机械制造与自动化2013，Vol.42Issue(1)：31-32,62,3.
ZnO压电薄膜微悬臂梁的结构设计及研究
Research on ZnO Piezoresistive Thin Film Micro-cantilever and Its Design
张敏亮 1谭晓兰 1王峰1
作者信息
- 1. 北方工业大学机电工程学院,北京100144
- 折叠
摘要
Abstract
When pressure is applied on the piezoelectric micro-cantilever with ZnO thin film, the sensitivity of the sensor can be directly determined by the generated charge. This paper deduces the equation, which is used to consider the relationship between the F and the Q, of the multi-layer micro-cantilever by the method of equivalent cross section. It provides the theoretical basis for the force measurement of the sensor. As compared with the micro-cantilever structure size, its sensitivity and resolution are improved. This study gives a reference to the design and optimization of the piezoelectric micro-cantilever pressure sensor.关键词
微压力传感器/微悬臂梁/ZnO薄膜/力-电荷量方程Key words
micro pressure sensor/ micro-cantilever/ ZnO thin film/ F-Q equation分类
机械制造引用本文复制引用
张敏亮,谭晓兰,王峰..ZnO压电薄膜微悬臂梁的结构设计及研究[J].机械制造与自动化,2013,42(1):31-32,62,3.
