无机材料学报2013，Vol.28Issue(2)：195-200,6.DOI:10.3724/SP.J.1077.2013.12196
TiN/VCN多层膜的力学性能及摩擦磨损性能研究
Mechanical Properties and Tribological Performance of TiN/VCN Multilayers
摘要
Abstract
Monolithic TiN, VCN films and TiN/VCN nano-multilayer films with different modulation periods were prepared by magnetron sputtering. Microstructures, mechanical properties and friction properties at room and high temperature of these films were investigated by X-ray diffraction (XRD), nano-indentation, and CSM high temperature ball-on-disc tribometer. The results show that the TiN/VCN multilayer films are mainly nanocrystalline with §-NaCl fee structure. Maximum hardness of TiN/VCN multilayer films is 28.71 GPa, about 23% higher than the value calculated by the rule of mixtures. Based on these data, a mechanism of the superhardness in this system is proposed. Friction coefficients of TiN/VCN multilayers are similar to that of TiN films at room temperature, but lower than that of TiN films when testing temperature is increased to 700℃. Wear rates of TiN/VCN multilayers at room and high temperature decrease about 3×l0-14 m3/(N-m) comparing to that of single layer film. The lubrication mechanism of Magneli phase (V2O5) is discussed in terms of crystal chemistry and thermal measurement methods. In conclusion, compared to TiN films, the friction and wear properties of TiN/VCN multilayer films are greatly improved.关键词
TiN/VCN/磁控溅射/力学性能/摩擦磨损性能/Magnéli相Key words
TiN/VCN/ magnetron sputtering/ mechanical properties/ friction properties/ Magneli phase分类
矿业与冶金引用本文复制引用
曹峻,许俊华,喻利花..TiN/VCN多层膜的力学性能及摩擦磨损性能研究[J].无机材料学报,2013,28(2):195-200,6.基金项目
国家自然科学基金(51074080) （51074080）
江苏省自然科学基金(BK2008240) （BK2008240）
江苏省研究生科研创新计划(CXLX11_0292) （CXLX11_0292）
