传感技术学报2013，Vol.26Issue(1)：63-66,4.DOI:10.3969/j.issn.1004-1699.2013.01.014
多波长边缘电场传感器参数估计算法的研究
Parameter Estimation Algorithm Simulation Research of Multi-Wavelength Fringing Electric Field Sensor
摘要
Abstract
Multi-wavelength fringing electric field sensors have been widely used in industry process control for property measurement of the multilayer material. The key point of parameter estimation algorithm lies in how the relationship between the sensor output and multilayer properties is constructed. The paper focuses on the three-wavelength interdigital sensor. The nonlinear regression model is constructed based on the 3D finite element simulation,which describe the relationship between the multilayer material dielectric property. The experiments of parameter estimation are done,the results show that the algorithm is effective.关键词
多波长/边缘电场传感器/交叉指型/非线性回归Key words
multi-wavelength/fringing electric field sensor/interdigital/nonlinear regression分类
信息技术与安全科学引用本文复制引用
黄云志,张慧凤,汪蓓蓓..多波长边缘电场传感器参数估计算法的研究[J].传感技术学报,2013,26(1):63-66,4.基金项目
国家自然科学基金项目(51007016) （51007016）
教育部留学回国人员启动基金项目 （）
安徽省科技攻关项目(12010302059) （12010302059）
