摘要
Abstract
Nanocrystalline-silicon thin-film cold cathode is a type of planar field emission cathode mainly consisted of massive nanometer-sized crystalline silicon particles covered by a ultra-thin oxide layer. They have potential applications in the field of vacuum nano-electronic devices and electron beam devices due to their simple structure, low operating voltage, insensitivity to the ambient pressure and good electron-emission direction. This article describes the structure, the electron emission mechanism, the fabrication technique, the research progress and the development trend of nanocrystalline-silicon thin-film cold cathodes.
关键词
纳米硅薄膜/隧道效应/冷阴极/电子发射Key words
Nanocrystalline-silicon thin-film, Tunnel effect, Cold cathode, Electron emission分类
数理科学
