吉林大学学报（理学版）2013，Vol.51Issue(2)：301-304,4.DOI:10.7694/jdxblxb20130231
Cu薄膜生长初期的计算机模拟
Computer Simulation of the Early Growth of Cu Films
摘要
Abstract
Two-dimensional computer graphic simulation on the initial growth of Cu thin film was made based on Monte Carlo model. In this model, 100 X 100 two-dimensional square lattice was established as the ideal substrate and the periodic boundary conditions were used. From the simulation results, it was found that with the increase of the number of the deposited particles, the particle-cluster deposited on the substrate increased. It was also found that with the increase of the migration step, the size and number of the cluster increased and the distribution became sparse when the temperature kept stable. In addition, the particles deposited assemble to the island with the increase of the temperature, the film was growing up into island.关键词
Monte Carlo模型/Cu薄膜/计算机模拟Key words
Monte Carlo model/ Cu film/ computer simulation分类
数理科学引用本文复制引用
刘楠,赵长春,孙瑶,王新,李野,端木庆铎..Cu薄膜生长初期的计算机模拟[J].吉林大学学报（理学版）,2013,51(2):301-304,4.基金项目
国家自然科学基金(批准号:11004016). （批准号:11004016）
