强激光与粒子束2013，Vol.25Issue(4)：890-894,5.DOI:10.3788/HPLPB20132504.0890
高功率激光装置大口径光学元件侧面清洗实验
Experiment on cleaning side of large-aperture optics in high power laser system
摘要
Abstract
Boron carbide films were deposited on Si and Ge substrates using KrF eximer laser. Influences of laser energy, distance between the target and substrate, and bias voltage were studied. A Fourier transform infrared spectroscope and a nano-indenter were used to test the optical transmission and hardness of the samples. Furthermore, the adhesion performance of the film and substrate was tested according to the common criterion of optical films. The largest transmission of Si and Ge advanced 10% after only one surface of substrates was coated by boron carbide films. The nano-hardness of the coated substrates reached more than 3 times that of the uncoated substrates and the adhesion was also satisfactory. The results show that boron carbide films are useful as anti-reflective and protective films for optical substrates.关键词
取样光栅/激光预处理/激光清洗/化学刻蚀Key words
laser deposition/ boron carbide film/ transmission/ hardness/ anti-reflective film分类
信息技术与安全科学引用本文复制引用
苗心向,程晓锋,王洪彬,秦朗,叶亚云,袁晓东,贺少勃,郑万国..高功率激光装置大口径光学元件侧面清洗实验[J].强激光与粒子束,2013,25(4):890-894,5.基金项目
中国工程物理研究院国防预研项目 （）
