强激光与粒子束2013，Vol.25Issue(4)：895-897,3.DOI:10.3788/HPLPB20132504.0895
碳化硼薄膜的激光法制备及性能
Preparation and properties of boron carbide film using pulsed laser deposition
王淑云 1陆益敏 1刘旭 1黄国俊 1郭延龙 1万强 1田方涛1
作者信息
摘要
Abstract
Boron carbide films were deposited on Si and Ge substrates using KrF eximer laser. Influences of laser energy, distance between the target and substrate, and bias voltage were studied. A Fourier transform infrared spectroscope and a nano-indenter were used to test the optical transmission and hardness of the samples. Furthermore, the adhesion performance of the film and substrate was tested according to the common criterion of optical films. The largest transmission of Si and Ge advanced 10% after only one surface of substrates was coated by boron carbide films. The nano-hardness of the coated substrates reached more than 3 times that of the uncoated substrates and the adhesion was also satisfactory. The results show that boron carbide films are useful as anti-reflective and protective films for optical substrates.关键词
激光沉积/碳化硼薄膜/透过率/硬度/增透膜Key words
laser deposition/ boron carbide film/ transmission/ hardness/ anti-reflective film分类
信息技术与安全科学引用本文复制引用
王淑云,陆益敏,刘旭,黄国俊,郭延龙,万强,田方涛..碳化硼薄膜的激光法制备及性能[J].强激光与粒子束,2013,25(4):895-897,3.
