厦门大学学报（自然科学版）2013，Vol.52Issue(2)：177-181,5.DOI:10.6043/j.issn.0438-0479.2013.02.007
非旋转对称三次方面形的非接触式检测方法
Non-contact Testing Method for Unsymmetrical Cubic Surface
摘要
Abstract
The unsymmetrical optical surfaces are on their way to becoming critical components of modern optical systems. But now for this kind of surf aces, the surface testing is mainly depending on the coordinate machine or the profiler. There are obvious shortcomings for these contact measurements. Computer-generated hologram (CGH) has been used for years in optical testing of aspheric surf aces, and it can produce an optical wavefront with any desired shape. So it is fascinating and will have good prospects to test unsymmetrical surfaces using CGH. And it is a non-contact testing method. Take a cubic surface for exampleTthe testing system design, the fabracation of the CGH and the testing process of the suface are presented in this paper. The testing result of the surface deviation is 1. 047 A-PV,and the RMS value is 0. 049 A. This method can become the effectively complement of the contact testing method.关键词
测量/非旋转对称/三次方面/计算全息图Key words
measurement/ unsymmetrical/cubic surface/computer-generated hologram(CGH)分类
信息技术与安全科学引用本文复制引用
许英朝,林洪沂..非旋转对称三次方面形的非接触式检测方法[J].厦门大学学报（自然科学版）,2013,52(2):177-181,5.基金项目
福建省高校杰出青年科研人才培育计划项目(JA11228) （JA11228）
福建省教育厅A类科技项目(JA12254,JA10248) （JA12254,JA10248）
福建省自然科学基金青年创新项目(2010J05144) （2010J05144）
