传感技术学报2013，Vol.26Issue(2)：293-296,4.DOI:10.3969/j.issn.1004-1699.2013.02.028
基于MEMS的微位移传感器及其应用研究
MEMS Based Micro Displacement Sensor and Its Application
孙凤鸣 1傅星 1朱振宇 1高赛 1张超1
作者信息
摘要
Abstract
A micro displacement sensor based on MEMS (Micro-Electro-Mechanical System) technology was developed for the micro-nano dimensional measurement as a SPM ( Scanning Probe Microscopy) head. This kind of electrostatic comb-drive structure consists of two interdigitated finger structures. One kind of fingers is fixed and the other is movable. A main shaft connected with the movable comb structures senses the surface displacement, which could generate a capacitance variation between the fixed and movable fingers. A signal detection circuit was conceived to convert the capacitance variation to the voltage variation. An experiment system was constructed. Approach test was carried out to calibrate the sensitivity of the head as 0.43 mV/nra. Experiment results indicate that the non-linearity error of the SPM head is less than 0.22%. The z axis measurement range of the SPM head is 10 μm. An SPM system including the SPM head is constructed to measure a grating structure in which step height is 108 nm.关键词
MEMS位移传感器/静电梳齿结构/微扫描探针测头/SPM应用Key words
MEMS displacement sensor/electrostatic comb-drive structure/micro-SPM head/SPM application分类
信息技术与安全科学引用本文复制引用
孙凤鸣,傅星,朱振宇,高赛,张超..基于MEMS的微位移传感器及其应用研究[J].传感技术学报,2013,26(2):293-296,4.
