测控技术2013，Vol.32Issue(4)：23-25,3.
金属基Pt/ITO薄膜热电偶的制备
Fabrication of Pt/ITO Thin-Film Thermocouple on Metal Substrates
摘要
Abstract
The Pt/ITO thin-film thermocouples with multilayer structure are fabricated on metal substrates. The thin-film thermocouple is composed of Ni-base alloy substrate, NiCrAlY buffer layer, thermal growth A12O3 layer, A12O3 insulating layer, Pt/ITO function layer and A12O3 protective layer. The results of the static calibration of the sample show that the average Seebeck coefficient is about 107.45 μV /℃. The test temperature can be up to 1000℃. The thermoelectric power of the sample can be effectively improved by aging treatment.关键词
Pt/ITO薄膜热电偶/静态标定/热电势/塞贝克系数Key words
Pt/ITO thin-film thermocouples/ static calibration/ thermoelectric power/ Seebeck coefficient分类
信息技术与安全科学引用本文复制引用
赵文雅,蒋洪川,陈寅之,张万里,刘兴钊,彭少龙,唐磊..金属基Pt/ITO薄膜热电偶的制备[J].测控技术,2013,32(4):23-25,3.基金项目
国防预研基金资助项目(51312050405) （51312050405）
