光学精密工程2013，Vol.21Issue(4)：955-962,8.DOI:10.3788/OPE.20132104.0955
抛光介质对固结磨料化学机械抛光水晶的影响
Effect of slurries on chemical mechanical polishing of decorative glasses by fixed-abrasive pad
摘要
Abstract
In chemical mechanical polishing by a fixed-abrasive pad, the hydrolysis between workpiece and slurries will form a softened layer on the glass substrate to effect on the Material Removal Rate (MRR) and surface quality. The influence of polishing slurries on the surface hardness of decorative glass is analyzed by the micro-hardness method in this paper. The effects of different slurries and temperatures on the MRR were investigated using a CP-4 lapping and polishing platform. Both the dynamic Acoustic Emission (AE) and Coefficient of Friction (COF) were continuously monitored in-situ during the polishing process. The results show that the network structure on the decorative glass surface is collapsed when the sodium hexametaphosphate was added to the slurries,and this layer is softer than the glass, which improved the material removal rate. With the temperature increased, the hy- drolysis effect is more obviously. Direct real-time monitoring of AE and COF can offer constructive significance for optimizing process parameters of polishing.关键词
抛光介质/固结磨料/化学机械抛光/软化层/显微硬度/材料去除速率Key words
polishing slurry/ fixed-abrasive/ chemical mechanical polishing/ softened layer/ microhardness/ material removal rate分类
信息技术与安全科学引用本文复制引用
居志兰,朱永伟,王建彬,樊吉龙,李军..抛光介质对固结磨料化学机械抛光水晶的影响[J].光学精密工程,2013,21(4):955-962,8.基金项目
国家自然科学基金资助项目(No.51175260) （No.51175260）
江苏省自然科学基金资助项目(No.BK2010516) （No.BK2010516）
中央高校基本科研业务费专项资金资助项目(No.NP2012516) （No.NP2012516）
江苏省高校优势学科建设工程资助项目 （）
