计量学报2013，Vol.34Issue(2)：122-127,6.DOI:10.3969/j.issn.1000-1158.2013.02.06
单频激光干涉仪非线性误差优化方法研究
Research of Nonlinearity Error Optimization for Single Frequency Laser Interferometer
摘要
Abstract
To decrease the influence of the nonlinearity error on accuracy and stability of single-frequency laser interferometer, the factors are researched. Based on the Jones matrix, the optical parameters of the system are expressed. The optimal control adjustment to improve single-frequency laser interferometer is described. Experimental results show that the ordinary adjustment is limited to improve the system accuracy. But the orthogonality of signals, interference fringe contrast and system sensitivity are improved by optimal control adjustment The interference fringe contrast vimax, o achieve to 0. 97, and the four periods of two signals turn into two periods which 1/8 wave plate is revolved.关键词
计量学/单频激光干涉仪/非线性误差/最优控制优化调校/干涉条纹对比度/灵敏度Key words
Metrology/ Single frequency laser interferometer/ Nonlinearity error/ Optimal control adjustment/ Interference fringe contrast/ System sensitivity分类
通用工业技术引用本文复制引用
黄雷,马宏,马钟焕,杨璐..单频激光干涉仪非线性误差优化方法研究[J].计量学报,2013,34(2):122-127,6.基金项目
国家863高技术研究发展计划资助项目(2007AA701203) （2007AA701203）
