贫氢富氩气氛下超纳米金刚石薄膜的生长OA北大核心CSCDCSTPCD
Growth of ultrananocrystalline diamond films in an Ar-rich CH4/H2/Ar atmosphere with varying H2 concentrations
利用微波等离子气相沉积法在5％ ～20％的氢气浓度下,制备出了超纳米金刚石薄膜(UNCD).利用扫描电子显微镜、XRD、表面轮廓仪及拉曼光谱研究了氢气浓度对超纳米金刚石薄膜的微结构、形貌、以及相组成的影响.结果表明,随着氢气浓度的增加,晶粒粒径及粗糙度都明显增加变大;在不大于10％的氢气浓度气氛下,可以发现晶粒粒径下降到6nm,甚至更低;即便氢气浓度达到20％,晶粒粒径仍然小于10rm.讨论了在富氩气氛下沉积的UNCD的实验结果以及沉积机制.这种…查看全部>>
Ultrananocrystalline diamond (UNCD) films were prepared by microwave plasma chemical vapor deposition using argon-rich CH4/H2/Ar plasmas with different H2 concentrations from 5 to 20％.The influence of the H2 concentration on the microstructure,morphology and phase composition of the UNCD films was investigated by SEM,XRD,surface profilometry and Raman spectroscopy.It is found that the grain size and surface roughness increase with the H2 concentration.The gr…查看全部>>
刘杰;黑立富;陈广超;李成明;唐伟忠;吕反修
化学化工
超纳米金刚石薄膜氢气浓度晶粒粒径
Ultrananocrystalline diamond filmHydrogen concentrationGrain size
《新型炭材料》 2013 (2)
CVD金刚石膜在变动载荷下的失效行为研究
134-139,6
National Natural Science Foundation of China (50872010,51102013).国家自然科学基金(50872010,51102013).
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