烟台大学学报（自然科学与工程版）2013，Vol.26Issue(2)：97-100,4.
沉积在氧化铝模板上的纳米SiC的结构和发光性质研究
Structural and Luminescent Properties of Nano-SiC Deposited on Anodic Alumina Templates
摘要
Abstract
We use second-anodization to prepare high-quality alumina templates, and then use magnetron sputtering to grow amorphous SiC material on these anodic alumina templates. Atomic force microscopy (AFM) results show that, it is able to form a layered, point-like and rod-like SiC nanostructure at different sputtering pressure 0.5-1. 5 Pa. Photoluminescence spectra (PL) show a strong bimodal structure of the emission peak between 550 -700 nm, with the change in growth conditions, the peaks significantly changes in the intensity. Effects of preparation conditions on the formation of nanostructure and the glow peak changes are analyzed.关键词
磁控溅射/氧化铝模板/SiC/光致发光Key words
magnetron sputtering/ alumina templates/ SiC/ photoluminescence分类
数理科学引用本文复制引用
徐大印,杨咏东,何志巍,李剑平,吴现成..沉积在氧化铝模板上的纳米SiC的结构和发光性质研究[J].烟台大学学报（自然科学与工程版）,2013,26(2):97-100,4.基金项目
国家自然科学基金资助项目(51007092) （51007092）
教育部重大项目培育基金资助项目(708014) （708014）
教育部专项基金(2010JS032) （2010JS032）
烟台大学青年基金资助项目(WL11Z$). （WL11Z$）
