硅酸盐通报2013，Vol.32Issue(4)：542-546,553,6.
石英块体表面制备氮化硅层的研究
Research on Synthesis of Si3N4 Coating on the Surface of Quartz Block
摘要
Abstract
Using ultrapure Si or Si3N4 powders as raw materials, SiO2, MgO and CaO, or selfmade glass powders as adhesives, mixed with PVA solution in different proportions, which were coated on the surface of quartz block and then sintered at 1500 ℃, for 180 min in N2 atmosphere, quartz coated with Si3N4 layer composites was made. XRD and EDS results showed that by taking SiO2, MgO and CaO as adhesives, the coated phase was Si3N4 or Si2N2O with a favorable thickness and good strength. However, the binding between the coated layer and quartz block was bad. While, by using glass as adhesives, the coated phase was Si3 N4 with comparable strength and thickness, and the binding strength between the layer and quartz block was also fairly good.关键词
氮化硅/石英块体/氧氮化硅/结合性Key words
Si3N4/ quartz block/ Si2N2O/ binding分类
通用工业技术引用本文复制引用
徐卓,吴一,邹正光,龙飞,申玉芳,顾强..石英块体表面制备氮化硅层的研究[J].硅酸盐通报,2013,32(4):542-546,553,6.基金项目
国家基金(51262004) （51262004）
广西自然科学基金重点项目(2010GXNSFD013010) （2010GXNSFD013010）
广西科学研究技术开发项目(桂科能09-007-02-08) （桂科能09-007-02-08）
广西科学研究与技术开发计划项目(桂科攻12118020-2-2-4) （桂科攻12118020-2-2-4）
2012年度广西高等学校重大科研资助项目(桂教科研(2012)10号2012ZD011) （桂教科研(2012）
